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泄漏速率: <0.016 sccm (bubble tight) 电源消耗: 0.5, 1.0, or 2.0 Watts 响应时间: <30 msec cycling (2 Watts) 压力: 0 to 85 psig (0.020" orifice) 0 to 50 psig (0.030" orifice) 0 to 20 psig (0.045" orifice) 真空度: 0-27 in Hg 通径: 0.020"/0.0075 Cv 0.030"/0.017 Cv 0.045"/0.027 Cv 接口: Manifold mount; Gasket and screws supplied |